Extending ion-track lithography to the low-energy ion regime

Ion-track lithography for thermoelectric applications

This work presents a novel process to fabricate nanostructures for thermoelectric applications by a combination of a traditional silicon microfabrication techniques, electroplating, and submicron ion-track nanolithography. Polyimide (Kapton HN, PI2731), and PMMA (polymethyl methacrylate) were ion-track irradiated and wet etched. Bi2Te3 nanowires (80 and 120 nm diameter) were electroplated with ...

LOW-ENERGY-ION ENHANCED DIFFUSION AT THE SURFACE OF METALS

Radiation enhanced diffusion at the surface of metals has been observed and studied for low-energy nitrogen ions at the surface of copper. The displacement of the target atoms during irradiation creates vacancies and other defects near the surface, thus enhancing the diffusion of implanted materials toward the surface and also into the solid. The mechanism has been studied here by a specia...

Towards a nanostructured thermoelectric generator using ion-track lithography

This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Prelimina...

Focused Ion Beam Lithography

low-energy-ion enhanced diffusion at the surface of metals

radiation enhanced diffusion at the surface of metals has been observed and studied for low-energy nitrogen ions at the surface of copper. the displacement of the target atoms during irradiation creates vacancies and other defects near the surface, thus enhancing the diffusion of implanted materials toward the surface and also into the solid. the mechanism has been studied here by a special met...